Selective drive of electrostatic actuators using remote inductive powering

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 269-273

  Takeuchi, Shoji ^a   Shimoyama, Isao ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Electrostatic microactuator; Planar microcoil; Remote inductive powering; Wireless actuation

Indexed keywords

ELECTRIC COILS; INDUCTANCE; RESONANT CIRCUITS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

PLANAR MICROCOIL; REMOTE INDUCTIVE POWERING; WIRELESS ACTUATION;

ELECTROSTATIC ACTUATORS;

EID: 0036141572     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00738-5     Document Type: Article

References (7)

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