Electrostatic impact-drive microactuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 590-593

  Mita, M ^a   Arai, M ^a   Tensaka, S ^b   Kobayashi, D ^a,d   Basset, P ^c   Kaiser, A ^c   Masquelier, P ^c   Buchaillot, L ^c   Collard, D ^c   Fujita, H ^a,d  

^a UNIVERSITY OF TOKYO   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

^c Institut Superieur de l'Electronique et du Numerique   (France)

^d JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DRIVES; ELECTROSTATIC DEVICES; IMPACT TESTING; LOADS (FORCES); MICROMACHINING; SILICON;

IMPACT-DRIVE MICROACTUATORS;

MICROACTUATORS;

EID: 0035015210     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906610     Document Type: Article

References (0)