A MEMS array for pneumatic conveyor and its control based on distributed system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 40-43

  Fukuta, Y ^a   Chapuis, Y A ^a   Mita, Y ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AIR; ARRAYS; CONVEYORS; DISTRIBUTED COMPUTER SYSTEMS; NOZZLES; SILICON;

AIR-FLOW FORCE APPLICATION; DISTRIBUTED CONTROL; OBJECT MANIPULATION; PNEUMATIC CONVEYOR;

MICROELECTROMECHANICAL DEVICES;

EID: 26844459987     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. K.-F. Böhringer and H. Choset, Distributed Manipulation, Kluwer Academic Publishing, 2000.
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4. S. Konishi and H. Fujita, "A Conveyance System Using Air Flow Based on the Concept of Distributed Micro Motion Systems", J. of MEMS, vol. 3, No. 2, pp. 54-58, 1994.
5. H. Fujita, "Autonomous Distributed Microsystems", J. SICE, vol. 97, No. 905, pp. 298-301, 1994.
6. Y. Fukuta, M. Yanada, A. Ino, Y. Mita, Y.-A. Chapuis, S. Konishi, S. Konishi, and H. Fujita, "Conveyor for pneumatic two-manipulation realized by arrayed MEMS and its control", J. of Robot. and Mech.., vol. 16, No. 2, pp. 163-170, 2004.
7. O. T. Guenat, T. Hirata, T. Akashi, M.-A. Grétillat, and F. De Rooij, "A pneumatic air table realized by micro-EDM", J. of MEMS, vol. 7, No. 4, pp. 380-385, 1998.
8. B. R. Donald, C. G. Levey, C. D. McGray, Daniela Rus, and M. Sinclair, "Power delivery and locomotion of untethered microactuators", J. of Microelectromechnical System, vol. 12, No. 6, pp.947-959, 2003.