Solar powered 10 mg silicon robot

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 706-711

  Hollar, Seth ^a   Flynn, Anita ^b   Bellew, Colby ^c   Pister, K S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MicroPropulsion Corporation   (United States)

^c Molecular Reflections   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEGREES OF FREEDOM (MECHANICS); POLYSILICON; ROBOTS; SILICON ON INSULATOR TECHNOLOGY; SOLAR CELLS;

AUTONOMOUS TWO-LEGGED MICROROBOT; ELECTROSTATIC INCHWORM MOTOR; SOLAR POWERED ROBOT;

MICROELECTROMECHANICAL DEVICES;

EID: 0037817685     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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