Electrodeposited copper inductors for intraocular pressure telemetry

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 124-129

  Puers, R ^a   Vandevoorde, G ^a   De Bruyker, D ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; COPPER; ELECTRODEPOSITION; INDUCTANCE MEASUREMENT; INTEGRATED CIRCUIT TESTING; INTEGRATED CIRCUITS; MICROELECTRONIC PROCESSING; PRESSURE MEASUREMENT; Q FACTOR MEASUREMENT; TELEMETERING;

COPPER INDUCTORS; INTRAOCULAR PRESSURE TELEMETRY; MICROMACHINED CHIP; MICROSYSTEM; PARALLEL RESONANT INDUCTIVE CAPACITIVE CIRCUIT;

ELECTRIC INDUCTORS;

EID: 0033704280     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/305     Document Type: Article

References (11)

1. Van Schuylenberg K, Peeters E, Puers R, Sansen W and Neetens A 1991 An implantable telemetric tonometer for direct intraocular pressure measurements Proc. 1st Eur. Conf. on Biomedical Engineering, (Nice) pp 194-5
2. Den Besten C 1993 Sensor systems for the measurement of intraocular pressure PhD Thesis T.U.Delft
3. Collins C 1967 Miniature passive pressure transducer for implanting in the eye IEEE Trans. Biomed. Eng. 14 74-83
4. Rosengren L, Bäcklund Y, Sjöström T, Hök B and Svedbergh B 1992 A system for wireless intraocular pressure measurements using a silicon micromachined sensor J, Micromech. Microeng. 2 202-4
5. Mokwa W and Schnakenberg U 1998 On-chip microsystems for medical applications Proc. Microsystem Symp. (Delft) pp 69-75
6. Van Schuylenberg K 1998 Optimisation of inductive powering of small biotelemetry implants PhD Thesis K U Leuven pp 218-20
7. Bruggeman A and Van Regemorter J C 1994 Inductief-capacitieve druksensor als intraoculair druktelemetriesysteem Master Thesis K U Leuven (in Dutch)
8. Romankiw L T 1987 Electrodeposition in the electronic industry 1987 Proc. Symp. on Electrodeposition Technology (San Diego) pp 13-41
9. Collins G J and Taylor T C 1999 Copper process characterisation Eur. Semicond. 41-50
10. Fransaer J, Bouet V, Celis J P, Gabrielli C, Huet F and Maurin G 1995 Perturbation of the flow of current to a disk electrode by an insulating sphere J. Electrochem. Soc. 142 4181-9
11. Crols J, Kinget P, Craninckx J and Steyaert M 1996 An analytical model of planar inductors on lowly doped silicon substrates for high frequency analog design up to 3 GHz Proc. Symp. on VLSI Circuits (Honolulu) pp 28-9