Selective metallization of cured SU-8 microstructures using electroless plating method

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 300-307

  Dai, Wen ^a   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

Author keywords

Electroless plating; Metallization; Selective; SU 8 microstructures; UV lithography

Indexed keywords

ASPECT RATIO; ELECTROLESS PLATING; LITHOGRAPHY; METALLIZING; SILICON; ULTRAVIOLET RADIATION;

POLYMER SURFACES; SEED LAYER; UV LITHOGRAPHY;

MICROSTRUCTURE;

EID: 33947233853     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.015     Document Type: Article

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