Focused high energy proton beam micromachining: A perspective view

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 158, Issue 1, 1999, Pages 165-172

  Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; HEAVY IONS; MICROMACHINING; PROTONS; RAPID PROTOTYPING; X RAY LITHOGRAPHY;

ION BEAM MICROMACHINING; PROTON BEAM MICROMACHINING;

ION BEAM LITHOGRAPHY;

EID: 0033323257     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00513-3     Document Type: Article

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