Conductive SU8 photoresist for microfabrication

Advanced Functional Materials

Volumn 15, Issue 9, 2005, Pages 1511-1516

  Jiguet, Sébastien ^a   Bertsch, Arnaud ^a   Hofmann, Heinrich ^a   Renaud, Philippe ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSIONS; ELECTRIC CONDUCTIVITY; ELECTROCHEMICAL ELECTRODES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SILVER;

MANUFACTURED STRUCTURES; MICROFABRICATION; NEGATIVE-TONE PHORORESIST; SILVER NANOPARTICLES;

PHOTORESISTORS;

EID: 24644488826     PISSN: 1616301X     EISSN: None     Source Type: Journal    
DOI: 10.1002/adfm.200400575     Document Type: Article

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