On the use of structural vibrations to release stiction failed MEMS

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 163-173

  Savkar, Amit A ^a   Murphy, Kevin D ^a   Leseman, Zayd C ^b   Mackin, Thomas J ^c   Begley, Matthew R ^d  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b MSC01 1070   (United States)

^c CALIFORNIA POLYTECHNIC STATE UNIVERSITY   (United States)

^d University of Virginia   (United States)

Author keywords

Repair; Stiction failure; Vibrations

Indexed keywords

CANTILEVER BEAMS; DYNAMIC RESPONSE; FAILURE ANALYSIS; INTERFACIAL ENERGY; STICTION; VIBRATIONS (MECHANICAL);

DECOHESION; DYNAMIC EXCITATION; MICROCANTILEVERS; STICTION FAILURE;

MICROELECTROMECHANICAL DEVICES;

EID: 33947224053     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885986     Document Type: Article

References (24)

1. R. Maboudian and R. T. Howe, "Critical review: Adhesion in surface micromechanical structures," J. Vac. Sci. Technol., vol. 15, no. 1, pp. 1-20, 1996.
2. W. M. van Spengen, "MEMS reliability from a failure mechanisms perspective," Microelectron. Reliab., vol. 43, no. 7, pp. 1049-1060, 2003.
3. E. E. Jones, M. R. Begley, and K. D. Murphy, "Adhesion of micro-cantilevers subjected to mechanical point loading: Modeling and experiments," J. Mech. Phys. Solids, vol. 51, pp. 1601-1622, 2003.
4. E. E. Jones, K. D. Murphy, and M. R. Begley, "Adhesion of micro-cantilevers subjected to mechanical point loading: Modeling and experiments," Exper. Mech., vol. 43, no. 3, pp. 280-288, 2003.
5. C. H. Mastrangelo and C. H. Hsu, "A simple experimental technique for the measurement of the work of adhesion of microstructures," in 5th Tech. Dig. IEEE Solid State Sens. Actuators Workshop, 1992, pp. 208-212.
6. M. P. de Boer, J. A. Knapp, T. A. Michalske, U. Srinivasan, and R. Maboudian, "Adhesion hysteresis of silicane coated microcantilevers," Acta Mater., vol. 48, pp. 4531-4541, 2000.
7. Z. C. Leseman, S. Koppaka, and T. J. Mackin, "A fracture mechanics description of stress wave repair in stiction-failed microcantilevers: Theory and experiments," J. Microelectromech. Syst., to be published.
8. Z. C. Leseman, S. Carlson, and T. J. Mackin, "Experimental measurements of the strain energy release rate for stiction-failed microcantilevers using a single-cantilever beam peel test," J. Microelectromech. Syst., to be published.
9. N. Fujitsuka and J. Sakata, "A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS," Sens. Actuators A, Phys., vol. 97-98, pp. 716-719, 2002.
10. W. R. Ashurst, C. Yau, C. Carraro, C. Lee, G. J. Kluth, T. R. Howe, and R. Maboudian, "Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS," Sens. Actuators A, Phys., vol. 91, no. 3, pp. 239-248, 2001.
11. V. Kaajakari and A. Lal, "Pulsed ultrasonic release and assembly of micromachines," in Proc. 10th Int. Conf. Solid-State Sens. Actuators, 1999, pp. 212-215.
12. V. Kaajakari, S. Rodgers, and A. Lal, "Ultrasonically driven surface micromachined motor," in Proc. 13th Int. Workshop Micro-Electro Mech. Syst., 2000, pp. 40-45.
13. N. C. Tien, S. Jeong, L. M. Phinney, K. Fushinobu, and J. Bokor, "Surface adhesion reduction in silicon microstructures using femotosecond laser pulses," Appl. Phys. Lett., vol. 66, no. 2, pp. 197-199, 1995.
14. K. Fushinobu, L. M. Phinney, and N. C. Tien, "Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion," Int. J. Heat Mass Transfer, vol. 39, no. 15, pp. 3181-3186, 1996.
15. L. M. Phinney and J. W. Rogers, "Pulsed laser repair of adhered surface - Micromachined polycrystalline silicon cantilevers," J. Adhes. Sci. Technol., vol. 17, no. 4, pp. 603-622, 2003.
16. J. W. Rogers, T. J. Mackin, and L. M. Phinney, "A thermomechanical model of adhesion reduction for MEMS cantilevers," J. Microelectromech. Syst., vol. 11, no. 5, pp. 512-520, 2002.
17. J. J. Sniegowski and M. P. de Boer, "IC-compatible polysilicon surface micromachining," in Annu. Rev. Mater. Sci., 2000, vol. 30, pp. 299-333.
18. J. W. Rogers and L. M. Phinney, "Process yields for laser repair of aged, sticiton-failed MEMS devices," J. Microelectromech. Syst., vol. 10, pp. 280-285, 2001.
19. C. T. Chang and R. C. Craig, "Normal modes of uniform beams," J. Eng. Mech. Div. ASCE, pp. 1027-1031, 1969.
20. B. Lawn, Fracture of Brittle Solids. Cambridge, U.K.: Cambridge Univ. Press, 1993.
21. L. B. Freund, Dynamic Fracture Mechanics. Cambridge, U.K.: Cambridge Univ. Press, 1990.
22. Y. Cho, P. A. Pisano, and T. R. Howe, "Viscous damping model for laterally oscillating microstructures," J. Microelectromech. Syst., vol. 3, no. 2, pp. 81-87, 1994.
23. J. M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan, and Q. A. Liu, "Mechanical design and optimization of capacitive micromachined switch," Sens. Actuators A, vol. 93, pp. 273-285, 2001.
24. R. P. Larose and K. D. Murphy, "Impact dynamics of MEMS switches," Sens. Actuators, submitted for publication.