Mechanical measurements of adhesion in microcantilevers: Transitions in geometry and cyclic energy changes

Experimental Mechanics

Volumn 43, Issue 3, 2003, Pages 280-288

  Jones, E E ^a   Murphy, K D ^a   Begley, M R ^b  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b UNIVERSITY OF VIRGINIA   (United States)

Author keywords

Adhesion; Mechanical measurements; MEMS; Stiction

Indexed keywords

ADHESION; CYCLIC LOADS; FABRICATION; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES;

NANOINDENTERS;

CANTILEVER BEAMS;

ADHESION; LOADING; MECHANICAL PROPERTY; MICROELECTROMECHANICAL SYSTEM; STICTION; TESTING METHOD;

EID: 0037710341     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02410526     Document Type: Article

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