A fracture mechanics description of stress-wave repair in stiction-failed microcantilevers: Theory and experiments

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 904-911

  Leseman, Zayd C ^a   Koppaka, Sai B ^b   Mackin, Thomas J ^c  

^a UNIVERSITY OF NEW MEXICO   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c CALIFORNIA POLYTECHNIC STATE UNIVERSITY   (United States)

Author keywords

Fracture mechanics; Laser; Stiction; Stress waves

Indexed keywords

ADHESION; CRACK PROPAGATION; FAILURE (MECHANICAL); FRACTURE MECHANICS; LASER PULSES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; STRESSES;

MICROCANTILEVERS; STRESS-WAVE REPAIR;

CANTILEVER BEAMS;

EID: 34548008150     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883571     Document Type: Article

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