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Volumn 53, Issue 9, 2006, Pages 2259-2264

Performance of low-dark-current 4H-SiC avalanche photodiodes with thin multiplication layer

Author keywords

Avalanche photodiode (APD); Impact ionization; Photodetector; Photodiode; Silicon carbide

Indexed keywords

AVALANCHE PHOTODIODES (APD); MULTIPLICATION LAYERS; NOISE FACTORS; TIME-DOMAIN PULSE MEASUREMENTS;

EID: 33947137661     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.879677     Document Type: Article
Times cited : (43)

References (25)
  • 1
    • 79956010143 scopus 로고    scopus 로고
    • Improved solar-blind detectivity using an AlGaN heterojunction p-i-n photodiode
    • May
    • C. J. Collins, U. Chowdhury, M. M. Wong, B. Yang, A. L. Beck, R. D. Dupuis, and J. C. Campbell, "Improved solar-blind detectivity using an AlGaN heterojunction p-i-n photodiode," Appl. Phys. Lett., vol. 80, no. 20, pp. 3754-3756, May 2002.
    • (2002) Appl. Phys. Lett , vol.80 , Issue.20 , pp. 3754-3756
    • Collins, C.J.1    Chowdhury, U.2    Wong, M.M.3    Yang, B.4    Beck, A.L.5    Dupuis, R.D.6    Campbell, J.C.7
  • 2
    • 4344590736 scopus 로고    scopus 로고
    • Solar-blind AIGaN-based p-i-n photodiodes with low dark current and high detectivity
    • Jul
    • N. Biyikli, I. Kimukin, O. Aytur, and E. Ozbay, "Solar-blind AIGaN-based p-i-n photodiodes with low dark current and high detectivity," IEEE Photon. Technol. Lett., vol. 16, no. 7, pp. 1718-1720, Jul. 2004.
    • (2004) IEEE Photon. Technol. Lett , vol.16 , Issue.7 , pp. 1718-1720
    • Biyikli, N.1    Kimukin, I.2    Aytur, O.3    Ozbay, E.4
  • 6
    • 0030268828 scopus 로고    scopus 로고
    • Status of silicon carbide as a wide-bandgap semiconductor for high-temperature applications: A review
    • Oct
    • J. B. Casady and R. W. Johnson, "Status of silicon carbide as a wide-bandgap semiconductor for high-temperature applications: A review," Solid State Electron., vol. 39, no. 10, pp. 1409-1422, Oct. 1996.
    • (1996) Solid State Electron , vol.39 , Issue.10 , pp. 1409-1422
    • Casady, J.B.1    Johnson, R.W.2
  • 7
    • 0002622512 scopus 로고    scopus 로고
    • Ionization rates and critical fields in 4H silicon carbide
    • Jul
    • A. O. Konstantinov, Q. Wahab, N. Nordell, and U. Lindefeit, "Ionization rates and critical fields in 4H silicon carbide," Appl. Phys. Lett., vol. 71, no. 1, pp. 90-92, Jul. 1997.
    • (1997) Appl. Phys. Lett , vol.71 , Issue.1 , pp. 90-92
    • Konstantinov, A.O.1    Wahab, Q.2    Nordell, N.3    Lindefeit, U.4
  • 8
    • 0032657521 scopus 로고    scopus 로고
    • 4H-SiC visible blind UV avalanche photodiodes
    • May
    • F. Yan, Y. Luo, J. H. Zhao, and G. H. Olsen, "4H-SiC visible blind UV avalanche photodiodes," Electron. Lett., vol. 35, no. 11, pp. 929-930, May 1999.
    • (1999) Electron. Lett , vol.35 , Issue.11 , pp. 929-930
    • Yan, F.1    Luo, Y.2    Zhao, J.H.3    Olsen, G.H.4
  • 9
    • 0036742265 scopus 로고    scopus 로고
    • Multiplication and excess noise characteristics of thin 4H-SiC avalanche photodiodes
    • Sep
    • B. K. Ng, F. Yan, J. P. R. David, R. C. Tozer, G. J. Rees, C. Qin, and J. H. Zhao, "Multiplication and excess noise characteristics of thin 4H-SiC avalanche photodiodes," IEEE Photon. Technol. Lett., vol. 14, no. 9, pp. 1342-1344, Sep. 2002.
    • (2002) IEEE Photon. Technol. Lett , vol.14 , Issue.9 , pp. 1342-1344
    • Ng, B.K.1    Yan, F.2    David, J.P.R.3    Tozer, R.C.4    Rees, G.J.5    Qin, C.6    Zhao, J.H.7
  • 11
    • 0343526838 scopus 로고    scopus 로고
    • Demonstration of the first 4H-SiC avalanche photodiodes
    • Feb
    • F. Yan, J. H. Zhao, and G. Olsen, "Demonstration of the first 4H-SiC avalanche photodiodes," Solid State Electron., vol. 44, no. 2, pp. 341-346, Feb. 2000.
    • (2000) Solid State Electron , vol.44 , Issue.2 , pp. 341-346
    • Yan, F.1    Zhao, J.H.2    Olsen, G.3
  • 12
    • 0345412054 scopus 로고    scopus 로고
    • Low dark current 4H-SiC avalanche photodiodes
    • Nov
    • X. Guo, A. Beck, B. Yang, and J. C. Campbell, "Low dark current 4H-SiC avalanche photodiodes," Electronics Lett., vol. 39, no. 23, pp. 1673-1674, Nov. 2003.
    • (2003) Electronics Lett , vol.39 , Issue.23 , pp. 1673-1674
    • Guo, X.1    Beck, A.2    Yang, B.3    Campbell, J.C.4
  • 14
    • 17744366211 scopus 로고    scopus 로고
    • Study of reverse dark current in 4H-SiC avalanche photodiodes
    • Apr
    • X. Guo, A. Beck, X. Li, and J. C. Campbell, "Study of reverse dark current in 4H-SiC avalanche photodiodes," IEEE J. Quantum Electron., vol. 41, no. 4, pp. 562-567, Apr. 2005.
    • (2005) IEEE J. Quantum Electron , vol.41 , Issue.4 , pp. 562-567
    • Guo, X.1    Beck, A.2    Li, X.3    Campbell, J.C.4
  • 15
    • 0036432230 scopus 로고    scopus 로고
    • A novel technology for the formation of a very small bevel angle for edge termination
    • F. Yan, C. Qin, J. H. Zhao, and M. Weiner, "A novel technology for the formation of a very small bevel angle for edge termination," Mater. Sci. Forum, vol. 389-393, pt. 1, pp. 1305-1308, 2002.
    • (2002) Mater. Sci. Forum , vol.389-393 , Issue.PART. 1 , pp. 1305-1308
    • Yan, F.1    Qin, C.2    Zhao, J.H.3    Weiner, M.4
  • 16
    • 26844524747 scopus 로고    scopus 로고
    • Spatial nonuniformity of 4H-SiC avalanche photodiodes at high gain
    • Oct
    • X. Guo, A. Beck, J. C. Campbell, D. Emerson, and J. Sumakeris, "Spatial nonuniformity of 4H-SiC avalanche photodiodes at high gain," IEEE J. Quantum Electron., vol. 41, no. 10, pp. 1213-1216, Oct. 2005.
    • (2005) IEEE J. Quantum Electron , vol.41 , Issue.10 , pp. 1213-1216
    • Guo, X.1    Beck, A.2    Campbell, J.C.3    Emerson, D.4    Sumakeris, J.5
  • 17
    • 0033079457 scopus 로고    scopus 로고
    • Temperature dependence of hole impact ionization coefficients in 4H and 6H-SiC
    • Feb
    • R. Raghunathan and B. J. Baliga, "Temperature dependence of hole impact ionization coefficients in 4H and 6H-SiC," Solid State Electron., vol. 43, no. 2, pp. 199-211, Feb. 1999.
    • (1999) Solid State Electron , vol.43 , Issue.2 , pp. 199-211
    • Raghunathan, R.1    Baliga, B.J.2
  • 18
    • 34548278636 scopus 로고
    • Physics of Semiconductor Devices
    • S. M. Sze, Physics of Semiconductor Devices. New York: Wiley, 1981, p. 522.
    • (1981) New York: Wiley , pp. 522
    • Sze, S.M.1
  • 19
    • 36749115816 scopus 로고
    • InGaAs photodiodes with dark current limited by generation-recombination and tunneling
    • Aug
    • S. R. Forrest, R. F. Leheny, R. E. Nahory, and M. A. Pollack, "InGaAs photodiodes with dark current limited by generation-recombination and tunneling," Appl. Phys. Lett., vol. 37, no. 3, pp. 322-325, Aug. 1980.
    • (1980) Appl. Phys. Lett , vol.37 , Issue.3 , pp. 322-325
    • Forrest, S.R.1    Leheny, R.F.2    Nahory, R.E.3    Pollack, M.A.4
  • 20
    • 0003426859 scopus 로고    scopus 로고
    • Properties of Advanced Semiconductor Materials GaN, AlN, BN, SiC, SiGe
    • G. Yu, M. E. Levinshtein, and S. L. Rumyantsev, Properties of Advanced Semiconductor Materials GaN, AlN, BN, SiC, SiGe.. New York: Wiley, 2001, pp. 93-148.
    • (2001) New York: Wiley , pp. 93-148
    • Yu, G.1    Levinshtein, M.E.2    Rumyantsev, S.L.3
  • 21
    • 0000401069 scopus 로고
    • Absorption of light in alpha SiC near the band edge
    • Mar
    • W. J. Choyke and L. Patrick, "Absorption of light in alpha SiC near the band edge," Phys. Rev., vol. 105, no. 6, pp. 1721-1723, Mar. 1957.
    • (1957) Phys. Rev , vol.105 , Issue.6 , pp. 1721-1723
    • Choyke, W.J.1    Patrick, L.2
  • 22
    • 0031186333 scopus 로고    scopus 로고
    • 6H-silicon carbide light emitting diodes and UV photodiodes
    • J. Edmond, H. Kong, A. Suvorov, D. Waltz, and C. Carter, "6H-silicon carbide light emitting diodes and UV photodiodes," Phys. Stat. Sol., vol. 162, no. 1, pp. 481-491, 1997.
    • (1997) Phys. Stat. Sol , vol.162 , Issue.1 , pp. 481-491
    • Edmond, J.1    Kong, H.2    Suvorov, A.3    Waltz, D.4    Carter, C.5
  • 25
    • 84922644221 scopus 로고
    • Multiplication noise in uniform avalanche diodes
    • Jan
    • R. J. McIntyre, "Multiplication noise in uniform avalanche diodes," IEEE Trans. Electron Devices, vol. ED-13, no. 1, pp. 164-168, Jan. 1966.
    • (1966) IEEE Trans. Electron Devices , vol.ED-13 , Issue.1 , pp. 164-168
    • McIntyre, R.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.