Velocity controlled anodization nanolithography with an atomic force microscope using Faradaic current feedback

Applied Physics Letters

Volumn 90, Issue 10, 2007, Pages

  Johannes, Matthew S ^a,b   Cole, Daniel G ^b,c   Clark, Robert L ^a,b  

^a Duke University   (United States)

^b Center for Biologically Inspired Materials and Material Systems (CBIMMS)   (United States)

^c University of Pittsburgh   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FARADAIC CURRENT FEEDBACK; SILICON OXIDE; TIP-SAMPLE INTERFACE;

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; FARADAY EFFECT; QUALITY CONTROL; SILICON ON INSULATOR TECHNOLOGY; VELOCITY CONTROL;

NANOLITHOGRAPHY;

EID: 33947101056     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2711377     Document Type: Article

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