Enhanced nano-oxidation on a SC1-treated Si surface using atomic force microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 A, 2002, Pages 4754-4757

  Moon, Won Chu ^a   Yoshinobu, Tatsuo ^a   Iwasaki, Hiroshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

AFM; Anodic oxidation; Hydrophilicity; Nanofabrication; Silicon

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; HYDROPHILICITY; NANOSTRUCTURED MATERIALS; SILANES; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

BIAS VOLTAGE; CHLOROTRIMETHYLSILANE; NANO-OXIDATION;

SEMICONDUCTING SILICON;

EID: 0036656344     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4754     Document Type: Article

References (11)