Theoretical analysis of current-driven interactions between voids in metallic thin films

Journal of Applied Physics

Volumn 101, Issue 2, 2007, Pages

  Cho, Jaeseol ^a   Rauf Gungor, M ^a   Maroudas, Dimitrios ^a  

^a University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC MATERIALS; ELECTROMIGRATION TESTING; METALLIC INTERCONNECT LINES; METALLIC THIN FILMS;

ANISOTROPY; DIRECT NUMERICAL SIMULATION; ELECTRIC RESISTANCE; ELECTROMIGRATION; THIN FILMS;

METALLIC FILMS;

EID: 33847735488     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2426901     Document Type: Article

References (26)

1. P. S. Ho and T. Kwok, Rep. Prog. Phys. 52, 301 (1989).
2. C. V. Thompson and J. R. Lloyd, MRS Bull. 18, 19 (1993).
3. R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 12, 2081 (1997).
4. C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
5. J. E. Sanchez, Jr., L. T. McKnelly, and J. W. Morris, Jr., J. Appl. Phys. 72, 3201 (1992).
6. J. H. Rose, Appl. Phys. Lett. 61, 2170 (1992).
7. E. Arzt, O. Kraft, W. D. Nix, and J. E. Sanchez, Jr., J. Appl. Phys. 76, 1563 (1994).
8. Y.-C. Joo and C. V. Thompson, J. Appl. Phys. 81, 6062 (1997).
9. J. C. Doan, J. C. Bravman, P. A. Flinn, and T. N. Marieb, Microelectron. Reliab. 40, 981 (2000).
10. J. S. Cho, M. R. Gungor, and D. Maroudas, Appl. Phys. Lett. 86, 241905 (2005).
11. D. Maroudas, Appl. Phys. Lett. 67, 798 (1995).
12. W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 79, 2394 (1996).
13. O. Kraft and E. Arzt, Acta Mater. 45, 1599 (1997).
14. M. R. Gungor and D. Maroudas, Appl. Phys. Lett. 72, 3452 (1998).
15. M. R. Gungor and D. Maroudas, J. Appl. Phys. 85, 2233 (1999).
16. D. R. Fridline and A. F. Bower, J. Appl. Phys. 85, 3168 (1999).
17. M. Mahadevan and R. M. Bradley, Phys. Rev. B 59, 11037 (1999).
18. M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
19. M. R. Gungor and D. Maroudas, Int. J. Fract. 109, 47 (2001).
20. J. S. Cho, M. R. Gungor, and D. Maroudas, Appl. Phys. Lett. 85, 2214 (2004).
21. M. R. Gungor and D. Maroudas, Surf. Sci. 415, L1055 (1998).
22. M. R. Gungor and D. Maroudas, Surf. Sci. 461, L550 (2000).
23. J. S. Cho, M. R. Gungor, and D. Maroudas, Surf. Sci. 575, L41 (2005).
24. J. S. Cho, M. R. Gungor, and D. Maroudas, Appl. Phys. Lett. 88, 221905 (2006).
25. M. Schimschak and J. Krug, Phys. Rev. Lett. 80, 1674 (1998).
26. S. Shingubara, H. Kaneko, and M. Saitoh, J. Appl. Phys. 69, 207 (1991).