SCOPUS 정보 검색 플랫폼

Volumn 88, Issue 22, 2006, Pages

Current-driven interactions between voids in metallic interconnect lines and their effects on line electrical resistance

(3) Cho, Jaeseol a Gungor, M Rauf a Maroudas, Dimitrios a

a University of Massachusetts (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIC INTERCONNECT LINES; VOID INTERACTIONS; VOID MIGRATION;

COALESCENCE; COMPUTER SIMULATION; ELECTRIC POWER SYSTEM INTERCONNECTION; ELECTRIC RESISTANCE; ELECTROMIGRATION; THIN FILMS;

ELECTRIC LINES;

EID: 33744829484 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2207849 Document Type: Article

Times cited : (22)

References (21)

1
- 0024766321
- 0360-2133
- See e.g., W. D. Nix, Metall. Trans. A 0360-2133 20A, 2217 (1989); P. S. Ho and T. Kwok, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/52/3/002 52, 301 (1989); C. V. Thompson and J. R. Lloyd, MRS Bull. 0883-7694 18, 19 (1993); R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 0884-2914 12, 2081 (1997); C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
- (1989) Metall. Trans. A , vol.20 , pp. 2217
- Nix, W.D.¹

2
- 1842617942
- 0034-4885 10.1088/0034-4885/52/3/002
- See e.g., W. D. Nix, Metall. Trans. A 0360-2133 20A, 2217 (1989); P. S. Ho and T. Kwok, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/52/3/002 52, 301 (1989); C. V. Thompson and J. R. Lloyd, MRS Bull. 0883-7694 18, 19 (1993); R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 0884-2914 12, 2081 (1997); C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
- (1989) Rep. Prog. Phys. , vol.52 , pp. 301
- Ho, P.S.¹ Kwok, T.²

3
- 84976040818
- 0883-7694
- See e.g., W. D. Nix, Metall. Trans. A 0360-2133 20A, 2217 (1989); P. S. Ho and T. Kwok, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/52/3/002 52, 301 (1989); C. V. Thompson and J. R. Lloyd, MRS Bull. 0883-7694 18, 19 (1993); R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 0884-2914 12, 2081 (1997); C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
- (1993) MRS Bull. , vol.18 , pp. 19
- Thompson, C.V.¹ Lloyd, J.R.²

4
- 0031207626
- 0884-2914
- See e.g., W. D. Nix, Metall. Trans. A 0360-2133 20A, 2217 (1989); P. S. Ho and T. Kwok, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/52/3/002 52, 301 (1989); C. V. Thompson and J. R. Lloyd, MRS Bull. 0883-7694 18, 19 (1993); R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 0884-2914 12, 2081 (1997); C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
- (1997) J. Mater. Res. , vol.12 , pp. 2081
- Gleixner, R.J.¹ Clemens, B.M.² Nix, W.D.³

5
- 0031695978
- See e.g., W. D. Nix, Metall. Trans. A 0360-2133 20A, 2217 (1989); P. S. Ho and T. Kwok, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/52/3/002 52, 301 (1989); C. V. Thompson and J. R. Lloyd, MRS Bull. 0883-7694 18, 19 (1993); R. J. Gleixner, B. M. Clemens, and W. D. Nix, J. Mater. Res. 0884-2914 12, 2081 (1997); C.-K. Hu and J. M. E. Harper, Mater. Chem. Phys. 52, 5 (1998).
- (1998) Mater. Chem. Phys. , vol.52 , pp. 5
- Hu, C.-K.¹ Harper, J.M.E.²

6
- 0001586026
- 0003-6951 10.1063/1.115471
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 798
- Maroudas, D.¹

7
- 0000362877
- 0021-8979 10.1063/1.361166
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (1996) J. Appl. Phys. , vol.79 , pp. 2394
- Wang, W.Q.¹ Suo, Z.² Hao, T.-H.³

8
- 0031117638
- 1359-6454 10.1016/S1359-6454(96)00231-5
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (1997) Acta Mater. , vol.45 , pp. 1599
- Kraft, O.¹ Arzt, E.²

9
- 0001497702
- 0021-8979 10.1063/1.369656
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (1999) J. Appl. Phys. , vol.85 , pp. 3168
- Fridline, D.R.¹ Bower, A.F.²

10
- 0001761870
- 0163-1829 10.1103/PhysRevB.59.11037
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (1999) Phys. Rev. B , vol.59 , pp. 11037
- Mahadevan, M.¹ Bradley, R.M.²

11
- 0000293143
- D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.115471 67, 798 (1995); W. Q. Wang, Z. Suo, and T.-H. Hao, J. Appl. Phys. 0021-8979 10.1063/1.361166 79, 2394 (1996); O. Kraft and E. Arzt, Acta Mater. 1359-6454 10.1016/S1359-6454(96)00231-5 45, 1599 (1997); D. R. Fridline and A. F. Bower, J. Appl. Phys. 0021-8979 10.1063/1.369656 85, 3168 (1999); M. Mahadevan and R. M. Bradley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.59.11037 59, 11037 (1999); M. Schimschak and J. Krug, J. Appl. Phys. 87, 695 (2000).
- (2000) J. Appl. Phys. , vol.87 , pp. 695
- Schimschak, M.¹ Krug, J.²

12
- 0000191007
- 0003-6951 10.1063/1.121663
- M. R. Gungor and D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.121663 72, 3452 (1998); M. R. Gungor and D. Maroudas Surf. Sci. 0039-6028 10.1016/S0039-6028(98)00565-2 415, L1055 (1998); M. R. Gungor and D. Maroudas J. Appl. Phys. 0021-8979 10.1063/1.369532 85, 2233 (1999); M. R. Gungor and D. Maroudas Surf. Sci. 461, L550 (2000).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3452
- Gungor, M.R.¹ Maroudas, D.²

13
- 0032500401
- 0039-6028 10.1016/S0039-6028(98)00565-2
- M. R. Gungor and D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.121663 72, 3452 (1998); M. R. Gungor and D. Maroudas Surf. Sci. 0039-6028 10.1016/S0039-6028(98)00565-2 415, L1055 (1998); M. R. Gungor and D. Maroudas J. Appl. Phys. 0021-8979 10.1063/1.369532 85, 2233 (1999); M. R. Gungor and D. Maroudas Surf. Sci. 461, L550 (2000).
- (1998) Surf. Sci. , vol.415 , pp. 1055
- Gungor, M.R.¹ Maroudas, D.²

14
- 0000580606
- 0021-8979 10.1063/1.369532
- M. R. Gungor and D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.121663 72, 3452 (1998); M. R. Gungor and D. Maroudas Surf. Sci. 0039-6028 10.1016/S0039-6028(98)00565-2 415, L1055 (1998); M. R. Gungor and D. Maroudas J. Appl. Phys. 0021-8979 10.1063/1.369532 85, 2233 (1999); M. R. Gungor and D. Maroudas Surf. Sci. 461, L550 (2000).
- (1999) J. Appl. Phys. , vol.85 , pp. 2233
- Gungor, M.R.¹ Maroudas, D.²

15
- 0001740171
- M. R. Gungor and D. Maroudas, Appl. Phys. Lett. 0003-6951 10.1063/1.121663 72, 3452 (1998); M. R. Gungor and D. Maroudas Surf. Sci. 0039-6028 10.1016/S0039-6028(98)00565-2 415, L1055 (1998); M. R. Gungor and D. Maroudas J. Appl. Phys. 0021-8979 10.1063/1.369532 85, 2233 (1999); M. R. Gungor and D. Maroudas Surf. Sci. 461, L550 (2000).
- (2000) Surf. Sci. , vol.461 , pp. 550
- Gungor, M.R.¹ Maroudas, D.²

16
- 7044274252
- J. S. Cho, M. R. Gungor, and D. Maroudas, Appl. Phys. Lett. 85, 2214 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 2214
- Cho, J.S.¹ Gungor, M.R.² Maroudas, D.³

17
- 12244302229
- J. S. Cho, M. R. Gungor, and D. Maroudas, Surf. Sci. 575, L41 (2005).
- (2005) Surf. Sci. , vol.575 , pp. 41
- Cho, J.S.¹ Gungor, M.R.² Maroudas, D.³

18
- 21344437495
- J. S. Cho, M. R. Gungor, and D. Maroudas, Appl. Phys. Lett. 86, 241905 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 241905
- Cho, J.S.¹ Gungor, M.R.² Maroudas, D.³

19
- 11744357312
- M. Schimschak and J. Krug, Phys. Rev. Lett. 80, 1674 (1998).
- (1998) Phys. Rev. Lett. , vol.80 , pp. 1674
- Schimschak, M.¹ Krug, J.²

20
- 0014710032
- P. S. Ho, J. Appl. Phys. 41, 64 (1970).
- (1970) J. Appl. Phys. , vol.41 , pp. 64
- Ho, P.S.¹

21
- 0041524180
- S. Shingubara, H. Kaneko, and M. Saitoh, J. Appl. Phys. 69, 207 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 207
- Shingubara, S.¹ Kaneko, H.² Saitoh, M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.