Direct observation of anomalous positive charge and electron-trapping dynamics in high-κ films using pulsed-MOS-capacitor measurements

IEEE Transactions on Electron Devices

Volumn 54, Issue 2, 2007, Pages 272-278

  Hall, Stephen ^a   Buiu, Octavian ^a   Lu, Yi ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

Anomalous positive charge (APC); Capacitance transient; Electron trapping or detrapping; High dielectrics; MOS capacitor

Indexed keywords

CAPACITANCE; CHEMICAL VAPOR DEPOSITION; DIELECTRIC FILMS; ELECTRON TRAPS; TRANSIENTS;

ANOMALOUS POSITIVE CHARGE (APC); DISCHARGING BEHAVIOR; OXIDE TRAPS; TRANSIENT CHARGING;

MOS CAPACITORS;

EID: 33847708382     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.888673     Document Type: Article

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