Energy dissipation mechanisms in lead zirconate titanate thin film transduced micro cantilevers

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 11, 2006, Pages 8795-8800

  Lu, Jian ^a   Ikehara, Tsuyoshi ^a   Zhang, Yi ^a   Maeda, Ryutaro ^a   Mihara, Takashi ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Energy dissipation; Mass sensor; MEMS; PZT cantilever; Quality factor

Indexed keywords

DAMPING; ENERGY DISSIPATION; LEAD COMPOUNDS; Q FACTOR MEASUREMENT; SILICA;

MASS SENSORS; MICRO CANTILEVERS; PZT CANTILEVERS;

THIN FILMS;

EID: 33847692947     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8795     Document Type: Article

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