Fabrication and application of polymer coated cantilevers as gas sensors

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 439-442

  Maute, M ^a   Raible, S ^a   Prins, F E ^a   Kern, D P ^a   Weimar, U ^a   Gopel W ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; QUARTZ; SILICON NITRIDE; SILICONES;

POLYMER COATED CANTILEVERS; QUARTZ CRYSTAL MICROBALANCE (QCM);

CHEMICAL SENSORS;

EID: 0033131628     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00128-8     Document Type: Article

References (8)

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8. [8] M. Maute, S. Raible, H. Ulmer, F.E. Prins, U. Weimar, D.P. Kern, W. Göpel, accepted for EUROSENSORS XII (1998)