Synthesis of functional nanoassemblies in reactive plasmas

Vacuum

Volumn 80, Issue 11-12, 2006, Pages 1126-1131

  Ostrikov, K ^a,b   Long, J D ^b   Rutkevych, P P ^b   Xu, S ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Deterministic nanofabrication; Nano and biomaterials; Nanoassembly; PECVD; Reactive plasma

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SEMICONDUCTOR QUANTUM DOTS;

DETERMINISTIC NANOFABRICATION; NANO- AND BIOMATERIALS; NANOASSEMBLY; REACTIVE PLASMA;

ASSEMBLY;

EID: 33748081438     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.01.025     Document Type: Article

References (15)

1. Roco MC, Williams S, Alivisatos P, editors. Nanotechnology research directions: vision for nanotechnology research and development in the next decade. Amsterdam: Kluwer Academic; 1999. See also: http://www.nano.gov.
2. Poole C.P., and Owens F.J. Introduction to nanotechnology (2003), Wiley, New York
3. Pitkethly M.J. Nano Today 6 (2003) 36
4. Oehrlein G.S. Plasma processing of electronic materials (2003), Springer, Berlin
5. Vladimirov S.V., and Ostrikov K. Phys Rep 393 (2003) 175
6. Ostrikov K. Rev Mod Phys 77 (2005) 489
7. Tsakadze Z.L., Ostrikov K., and Xu S. Surf Coat Technol 191/1 (2005) 49
8. Chua HL, Xu S. Proceedings of second international conference on nanostructures and nanotechnology, 25-26 November 2004, Singapore, paper T18.
9. Levchenko I, Ostrikov K, Keidar M, Xu S, J Appl Phys 2005;98:064304.
10. Rutkevych PP, Ostrikov K, Xu S. Phys Plasmas 2005;12:062105.
11. Ostrikov K.N., Vladimirov S.V., Yu M.Y., and Morfill G.E. Phys Rev E61 (2000) 4315
12. Ostrikov K.N., Vladimirov S.V., Yu M.Y., and Morfill G.E. Phys Plasmas 7 (2000) 461
13. Levchenko I, Ostrikov K. Proceedings of the "complex systems" conference, a part of the SPIE microelectronics, MEMS, and nanotechnology symposium, 11-14 December 2005, Brisbane, Australia. SPIE proceedings paper 6039-24.
14. Hwang N.M., and Kim D.Y. Int Mater Rev 49 (2004) 171
15. Xu S., Long J.D., Sim L., Diong C.H., and Ostrikov K. Plasma Proc Polym 2 (2005) 373