Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets

Optics Letters

Volumn 31, Issue 10, 2006, Pages 1549-1551

  Harilal, S S ^a   Tillack, M S ^a   Tao, Y ^a   O'Shay B ^a   Paguio, R ^b   Nikroo, A ^b  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

^b GENERAL ATOMICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION EFFICIENCY; EUV EMISSION ENERGY; ION DEBRIS; SPECTRAL PURITY;

CALORIMETERS; IMPURITIES; MAGNETIC FIELDS; OPTICAL FREQUENCY CONVERSION; TIN; ULTRAVIOLET RADIATION;

LIGHT EMISSION;

EID: 33745748303     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.31.001549     Document Type: Article

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