High-efficiency clean EUV plasma source at 10-30 nm, driven by a long-pulse-width excimer laser

Applied Physics B: Lasers and Optics

Volumn 76, Issue 3, 2003, Pages 277-284

  Bollanti, S ^a   Bonfigli, F ^a   Burattini, E ^b   Di Lazzaro, P ^a   Flora, F ^a   Grilli, A ^b   Letardi, T ^a   Lisi, N ^a   Marinai, A ^d   Mezi, L ^a   Murra, D ^a   Zheng, C ^c  

^a ENEA   (Italy)

^b INFN LABORATORI NAZIONALI DI FRASCATI   (Italy)

^c ElEn SpA   (Italy)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; EXCIMER LASERS; IRRADIATION; LITHOGRAPHY; PHOTONS;

SOLID-TARGET LASER-PLASMA SOURCES;

PLASMA SOURCES;

EID: 0038296003     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-002-1088-0     Document Type: Article

References (32)

1. C. Montcalm, S. Bajt, P.B. Mirkarimi, E.A. Spiller, F.J. Weber, J.A. Folta: Proc. SPIE 3331, 42 (1998)
2. J.H. Underwood: Proc. SPIE 2523, 51 (1995)
3. I.A. Artyukov, A.I. Fedorenko, V.V. Kondratenko, S.A. Yulin, A.V. Vinogradov: Opt. Commun. 102, 401 (1993)
4. S. Bajt, J.B. Alameda, T.W. Barbee, W.M. Clift, J.A. Folta, B.B. Kaufmann, E.A. Spiller: Proc. SPIE 4506, 65 (2001)
5. H. Shields, M.F. Powers, I.C.E. Turcu, I.N. Ross, J.R. Maldonado, P.G. Burkhalter, D.A. Newman: Proc. SPIE 2523, 122 (1995)
6. H.M. Hertz, L. Rymell, M. Berglund, L. Malmqvist: Proc. SPIE 2523, 88 (1995)
7. H. Fiedorowicz, A. Bartnik, R. Jarocki, M. Szczurek, T. Wilhein: Appl. Phys. B 67, 391 (1998)
8. P. Celliers, L.B. DaSilva, C.B. Dane, S. Mrowka, M. Norton, J. Harder, L. Hackel, D.L. Matthews, H. Fiedorowicz, A. Bartnik, J.R. Maldonado, J.A. Abate: J. Appl. Phys. 79, 8258 (1996)
9. H.M. Hertz, M. Berglund, B.A. Hansson, L. Rymell: Proc. SPIE 3767, 2 (1999)
10. G.D. Kubiak, L.J. Bernardez, K.D. Krenz, W.C. Replogle, W.C. Sweatt, D.W. Sweeney, R.M. Hudyma, H. Shields: Proc. SPIE 3767, 136 (1999)
11. S. Bollanti, R. Cotton, P. Di Lazzaro, F. Flora, T. Letardi, N. Lisi, D. Batani, A. Conti, L. Palladino, A. Reale, M. Belli, F. Ianzini, A. Scafati, L. Reale, A. Tabocchini, A. Faenov, T. Pikuz, A. Osterheld: Nuovo Cimento D 18, 1241 (1996)
12. S. Bollanti, P. Albertano, M. Belli, P. Di Lazzaro, A.Y. Faenov, F. Flora, G. Giordano, A. Grilli, F. Ianzini, S.V. Kukhlevsky, T. Letardi, A. Nottola, L. Palladino, T. Pikuz, A. Reale, L. Reale, A. Scafati, M.A. Tabocchini, I.C.E. Turcu, K. Vigli-Papadaki, G. Schina: Nuovo Cimento D 20, 1685 (1998)
13. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, G. Schina, C.E. Zheng, L. Filippi, L. Palladino, A. Reale, G. Taglieri, D. Batani, A. Mauri, M. Belli, A. Scafati, L. Reale, P. Albertano, A. Grilli, A. Faenov, T.A. Pikuz, R. Cotton: J. X-ray Sci. Technol. 5, 261 (1995)
14. S. Bollanti, R.A. Cotton, P. Di Lazzaro, F. Flora, T. Letardi, N. Lisi, D. Batani, A. Conti, A. Mauri, L. Palladino, A. Reale, A.Y. Faenov, T.A. Pikuz, A.L. Osterheld: Proc. SPIE 2523, 70 (1995)
15. S. Bollanti, P. Di Lazzaro, F. Flora, T. Letardi, A. Marinai, A. Nottola, K. Vigli-Papadaki, A. Vitali, F. Bonfigli, N. Lisi, L. Palladino, A. Reale, C.E. Zheng: Proc. SPIE 3767, 33 (2000)
16. G.M. Zeng, H. Daido, T. Nishikawa, H. Takabe, S. Nakayama, H. Aritome, K. Murai, Y. Kato, M. Nakatsuka, S. Nakai: J. Appl. Phys. 75, 1923 (1994); see also F. Bijkerk, A.P. Shevelko, L.A. Shmaenok, S.S. Churilov: Proc. SPIE 3157, 236 (1997)
17. G.M. Zeng, H. Daido, T. Nishikawa, H. Takabe, S. Nakayama, H. Aritome, K. Murai, Y. Kato, M. Nakatsuka, S. Nakai: J. Appl. Phys. 75, 1923 (1994); see also F. Bijkerk, A.P. Shevelko, L.A. Shmaenok, S.S. Churilov: Proc. SPIE 3157, 236 (1997)
18. W.T. Silfvast: IEEE J. Quantum Electron. 35, 700 (1999)
19. H.A. Bender, D. O'Connell, W.T. Silfvast: Appl. Opt. 34, 6513 (1995)
20. V.G. Bakaev, V.Yu. Korol', I.G. Lebo, N.N. Mel'nik, G.E. Metreveli, A.G. Molchanov, V.V. Nikishin, V.B. Rozanov, G.V. Sychuqov, V.F. Tishkin, V.D. Zvorykin: 'Laser-Target Interactions in KrF GARPUN Facility'. In: Reprint No 69 of Lebedev Physical Inst., (Russian Academy of Sciences, Moscow 1997)
21. S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, C. Zheng: Eur. Phys. J. D (2002) submitted
22. T. Letardi, D. Lo, C. Zheng: J. Appl. Phys. 89, 1458 (2001)
23. F. Flora, L. Mezi, C.E. Zheng F. Bonfigli: Europhys. Lett. 56, 676 (2001)
24. B.L. Henke, E.M. Gullikson J.C. Davis: At. Data Nucl. Data Tables 54, 181 (1993)
25. F. Bijkerk, L. Shmaenok, A. Vanhonk, R. Bastiaensen, Y.Y. Platonov, A.P. Shevelko, A.V. Mitrofanov, F. Voss, R. Desor, H. Frowein, B. Nikolaus: J. Phys. III 4, 1669 (1994)
26. I.C.E. Turcu, J.B. Dance: X-Rays From Laser Plasmas - Generation and Applications, (Wiley, New York 1999), p. 222
27. F. Flora, L. Mezi, C. Zheng: Italian Patent No. RM2000 A000636 (2000)
28. M.A. Ordal, L.L. Long, R.J. Bell, S.E. Bell, R.R. Bell, R.W. Alexander Jr., C.A. Ward: Appl. Opt. 22, 1099 (1983)
29. T. Mochizuki, A. Shimoura, S. Amano, S. Miyamoto: Proc. SPIE 4504, 87 (2001)
30. D. Attwood: Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications, (Cambridge University Press, Cambridge 1999)
31. R.H. Stulen, D.W. Sweeney: IEEE J. Quantum Electron. 35, 694 (1999)
32. Web site: http://cindy.lbl.gov/optical_constants