Ultraviolet emitting (Y1-xGdx)2O3 - δ thin films deposited by radio frequency magnetron sputtering; structure-property-thin film processing relationships

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3488-3498

  Fowlkes, J D ^a,c   Fitz Gerald, J M ^b   Rack, P D ^a,c  

^a University of Tennessee Knoxville   (United States)

^b University of Virginia   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Gadolinium; Luminescence; X ray diffraction; Yttrium oxide

Indexed keywords

ANNEALING; CATHODOLUMINESCENCE; GADOLINIUM; LIGHT EMISSION; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; SPUTTER DEPOSITION; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS; YTTRIUM ALLOYS;

CRYSTALLINITY; RADIO FREQUENCY MAGNETRON SPUTTERING; SPUTTERING PARAMETERS; ULTRAVIOLET EMISSION;

THIN FILMS;

EID: 33846930151     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.108     Document Type: Article

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