|
|
|
Volumn 611, Issue , 2001, Pages
|
|
Physical and electrical properties of yttrium silicate thin films
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
CMOS INTEGRATED CIRCUITS;
DIELECTRIC MATERIALS;
ELECTRON ENERGY LEVELS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GATES (TRANSISTOR);
SILICA;
SPUTTERING;
VACUUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
YTTRIUM COMPOUNDS;
YTTRIUM SILICATE THIN FILMS;
THIN FILMS;
|
|
EID: 0035039351
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (1)
|
|
References (12)
|
