Yttrium oxide thin films: Chemistry- stoichiometry-strain and microstructure

Crystal Engineering

Volumn 5, Issue 3-4 SPEC., 2002, Pages 169-175

  Paumier, F ^a   Gaboriaud, R J ^a   Kaul, A R ^b  

^a UNIVERSITÉ DE POITIERS   (France)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Microstructure; Strain; Thin films; Yttrium oxide

Indexed keywords

ACTIVATION ENERGY; CRYSTALLOGRAPHY; MICROSTRUCTURE; STOICHIOMETRY; STRAIN; STRESS RELAXATION; TEMPERATURE; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ARHENIUS CURVES;

YTTRIUM COMPOUNDS;

EID: 0037285411     PISSN: 14630184     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1463-0184(02)00026-6     Document Type: Article

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