Combined shear-force/field emission microscope for local electrical surface investigation

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 542-546

  Sikora, Andrzej ^a   Gotszalk, Teodor ^b   Szeloch, Roman ^b  

^a ELECTROTECHNICAL INSTITUTE   (Poland)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRY-PEROT INTERFEROMETERS; FIELD EMISSION MICROSCOPES; GRAPHITE; SHEAR STRENGTH; TUNGSTEN;

ELECTRICAL SURFACE INVESTIGATION; ELECTROCHEMICALLY ETCHED TUNGSTEN; HIGHLY ORDERED PYROLYTIC GRAPHITE (HOPG); MICROTIP OSCILLATION;

SURFACE PROPERTIES;

EID: 33846923529     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.070     Document Type: Article

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