Amorphous carbon nitride films: Structure and electrical properties

Acta Physica Slovaca

Volumn 50, Issue 6, 2000, Pages 679-684

  Radnoczi G ^a   Safran G ^a   Kovacs I ^a   Geszti, O ^a   Biro L ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

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Indexed keywords

EID: 0034346642     PISSN: 03230465     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. A. M. Liu, M. L. Cohen: Science 245 (1989) 841
2. H. Sjöström, S. Stafström, M. Boman, J.-E. Sundgren: Phys. Rev. Lett. 75 (1995) 1336
3. G. Sáfrán, I. Kovács, O. Geszti, I. Bertóti, G. Radnóczi: in Proc. IV Multinational Congress on Electron Microscopy, ed. K. Kovács, Veszprém, Hungary, September, 1999, p. 361
4. F. Y. Chuang, C. Y. Sun, T. T. Chen, I. N. Lin: Appl. Phys. Lett. 69 (1995) 3504