Combined Shear Force-Tunneling Microscope with Interferometric Tip Oscillation Detection for Local Surface Investigation and Oxidation

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 144-156

  Sikora, Andrzej ^a   Gotszalk, Teodor ^a   Szeloch, Roman ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Combined shear force tunneling microscope; Development of SPM and sensors; Electrical properties; Instrumentation; Interferometric tip oscillation detection; Local surface investigation; Local surface oxidation; Methods; Nanoscale calibration standards

Indexed keywords

EID: 84889628992     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch11     Document Type: Chapter

References (19)

1. K. Karrai and R. D. Grober, Piezoelectric tip-sample distance control for near field optical microscopes, Appl. Phys. Lett. 66, 1842 (1995).
2. G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Surface studies by scanning tunneling microscopy, Phys. Rev. Lett. 49, 57 (1982).
3. J. U. Schmidt, H. Bergander, and L. M. Eng, Shear force interaction in the viscous damping regime studied at 100 pN force resolution, J. Appl. Phys. 87, 3108 (2000).
4. R. Garcia, M. Calleja, and H. Rohrer, Patterning of silicon surfaces with noncontact atomic force microscopy: field induced formation of nanometer-size water bridges, Appl. Phys. 86, 1898 (1999).
5. J. A. Dagata, T. Inoue, J. Itoh, K. Matsumoto, and H. Yokoyama, The role of space charge in scanned probe oxidation, J. Appl. Phys. 84, 6891 (1998).
6. M. Calleja and R. Garcia, Nano-oxidation of silicon surfaces by non-contact atomicforce microscopy: size dependence on voltage and pulse duration, Appl. Phys. Lett. 76, 3427 (2000).
7. M. Tello and R. Garcia, Nano-oxidation of silicon surfaces: comparison of non-contact and contact atomic-force microscopy methods, Appl. Phys. Lett. 79, 424 (2001).
8. J. A. Dagata, F. Perez-Murano, G. Abadal, K. Morimoto, T. Inoue, J. Itoh, and H. Yokoyama, A predictive model for scanned probe oxidation kinetics, Appl. Phys. Lett. 76, 2710 (2000).
9. K. Matsumoto, Y. Gotoh, T. Maeda, J. A. Dagata, and J. S. Harris, Room-temperature single-electron memory made by pulse-mode atomic force microscopy nano-oxidation process on an atomically flat a-alumina substrate, Appl. Phys. Lett. 76, 239 (2000).
10. E. S. Snow, P.M. Campbell, F. A. Buot, D. Park, C. R.K. Marrian, and R. Magno, A metal/oxide tunneling transistor, Appl. Phys. Lett. 72, 3071 (1998).
11. R. Held, T. Vancura, T. Heinzel, K. Ensslin, M. Holland, and W. Wegscheider, In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope, Appl. Phys. Lett. 73, 262 (1998).
12. E. B. Cooper, S. R. Manalis, H. Fang, H. Dai, S. C. Minne, T. Hunt, and C. F. Quate, Terabit-per-square-inch data storage with the atomic force microscope, Appl. Phys. Lett. 75, 3566 (1999).
13. V. Bouchiat, M. Faucher, C. Thirion, W. Wernsdorfer, T. Fournier, and B. Pannetier, Josephson junctions and superconducting quantum interference devices made by local oxidation of niobium ultrathin films, Appl. Phys. Lett. 79, 123 (2001).
14. S. C. Minne, J. D. Adams, G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate, Centimeter scale atomic force microscope imaging and lithography, Appl. Phys. Lett. 73, 1742 (1998).
15. R. Watersa and B. Van Zeghbroeck, Fowler-Nordheim, Tunneling of holes through thermally grown SiO2 on p{thorn} 6H-SiC, Appl. Phys. Lett. 73(25), 3692 (1998).
16. J. Planes, F. Houze, P. Chretien, and O. Schneegans, Conducting probe atomic force microscopy applied to organic conducting blends, Appl. Phys. Lett. 79(18), 2993 (2001).
17. D.W. van der Weide and P. Neuzil, The nanoscilloscope: combined topography and ac field probing with a micromachined tip, J. Vac. Sci. Technol. B 14(6), 4144 (1996).
18. M. P. O'Boyle, T. T. Hwang, and H. K. Wickramasinghe, Atomic force microscopy of work functions on the nanometer scale, Appl. Phys. Lett. 74(18), 2641 (1999).
19. A. Sikora, T. Gotszalk, R. Szeloch, A. Sankowska, and A. Marendziak, Modularny mikroskop tunelowy i sił atomowych do bada własności elektrycznych nanostruktur, in Conference Materials "KKE Kołobrzeg 2003" (2003) Vol.79.