Impedance spectroscopy study of RuO2/SrTiO3 thin film capacitors prepared by radio-frequency magnetron sputtering

Materials Science and Engineering: B

Volumn 130, Issue 1-3, 2006, Pages 237-245

  Reddy, Y K Vayunandana ^a   Mergel, D ^a   Osswald, W ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Capacitors; Dielectric permittivity; Impedance; Sputtering; Strontium titanate

Indexed keywords

ELECTRODES; EQUIVALENT CIRCUITS; MAGNETRON SPUTTERING; SPECTROSCOPIC ANALYSIS; STRONTIUM COMPOUNDS; THIN FILMS;

COLE-COLE PLOT; HIGH-FREQUENCY SEMICIRCLE; OXYGEN PARTIAL PRESSURES; RADIO-FREQUENCY;

CAPACITORS;

EID: 33846256724     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2006.03.013     Document Type: Article

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