Texture analysis of thin In2O3:Sn films prepared by direct-current and radio-frequency magnetron-sputtering

Journal of Materials Research

Volumn 20, Issue 9, 2005, Pages 2503-2509

  Mergel, Dieter ^a   Thiele, Karola ^b   Qiao, Zhaohui ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; TEXTURES; THIN FILMS; X RAY POWDER DIFFRACTION;

DIRECT CURRENT SPUTTERING; RADIO FREQUENCY MAGNETRON SPUTTERING; TEXTURE ANALYSIS;

INDIUM COMPOUNDS;

EID: 29144480910     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0297     Document Type: Article

References (18)

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