Crystal structure and dielectric properties of radio frequency magnetron sputtered nanocrystalline SrTiO3 thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9, 2004, Pages 6323-6328

  Wang, Moo Chin ^a,d   Hsiao, Fu Yuan ^b   Huang, Hong Hsin ^c   Wu, Nan Chun ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c CHENG SHIU UNIVERSITY   (Taiwan)

^d NATIONAL UNITED UNIVERSITY   (Taiwan)

Author keywords

Dielectric constant; DRAM capacitor; Name crystalline SrTiO3 thin films; RF magnetron sputtering

Indexed keywords

CRYSTAL STRUCTURE; DIELECTRIC PROPERTIES; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; STRONTIUM COMPOUNDS; THICKNESS MEASUREMENT; X RAY DIFFRACTION;

BARRIER METALS; CRYSTALLINITY; DRAM CAPACITOR; POLYVINYL ACETATE (PVA);

THIN FILMS;

EID: 9144246515     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6323     Document Type: Article

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