Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 564-570

  Wang, Xin ^a   Helmersson, Ulf ^a   Madsen, Lynnette D ^a   Ivanov, Ivan P ^a,d   Münger, Peter ^a   Rudner, Staffan ^a,b   Hjorvarsson B ^c   Sundgren, Jan Eric ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b SWEDISH DEFENCE RESEARCH AGENCY   (Sweden)

^c UPPSALA UNIVERSITY   (Sweden)

^d CYPRESS SEMICONDUCTOR   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033455150     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581619     Document Type: Article

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