High-efficiency collector design for extreme-ultraviolet and x-ray applications

Applied Optics

Volumn 45, Issue 35, 2006, Pages 8882-8888

  Zocchi, Fabio E ^a  

^a Media Lario Technologies   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GRADIENT INDEX OPTICS; LITHOGRAPHY; PLASMA SOURCES; REFLECTION; ULTRAVIOLET DETECTORS; X RAY ANALYSIS;

GRAZING-INCIDENCE ANGLES; HOT PLASMA SOURCE; TWO-REFLECTION MIRROR; ULTRAVIOLET MICROLITHOGRAPHY;

MIRRORS;

EID: 33846206933     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.008882     Document Type: Article

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