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Volumn 9, Issue 6, 2006, Pages 1125-1132

Low temperature processed hafnium oxide: Structural and electrical properties

Author keywords

Dielectrics; Hafnium oxide; Sputtering

Indexed keywords

ANNEALING; ELECTRIC PROPERTIES; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; PERMITTIVITY; THIN FILMS;

EID: 33846115181     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2006.10.031     Document Type: Article
Times cited : (30)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.