Spectroscopic ellipsometry of TiO2 layers prepared by ion-assisted electron-beam evaporation

Thin Solid Films

Volumn 360, Issue 1-2, 2000, Pages 96-102

  Bhattacharyya, D ^a   Sahoo, N K ^a   Thakur, S ^a   Das, N C ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; DISPERSION (WAVES); ELLIPSOMETRY; ENERGY ABSORPTION; EVAPORATION; FILM PREPARATION; GLASS; MONOLAYERS; REFRACTIVE INDEX; SIMULATION; SPECTROSCOPIC ANALYSIS; TITANIUM DIOXIDE;

ION ASSISTED ELECTRON BEAM EVAPORATION; ION BEAM CURRENTS; PHASE MODULATED SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING FILMS;

EID: 0034140180     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00966-9     Document Type: Article

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