Modelling and measurements of a composite microcantilever beam for chemical sensing applications

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Volumn 220, Issue 10, 2006, Pages 1601-1608

  Voiculescu, Ioana R ^a   Zaghloul, M E ^b   McGill, R A ^c   Vignola, J F ^c  

^a City College of New York   (United States)

^b The George Washington University   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Cantilever beam; Chemical sensing; Complementary metal oxide semiconductor technology; Microelectromechanical systems; Partition coefficient I

Indexed keywords

CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; FREQUENCY RESPONSE; NATURAL FREQUENCIES; TRANSDUCERS;

CHEMICAL SENSING; MICROELECTROMECHANICAL SYSTEMS; PARTITION COEFFICIENT;

CHEMICAL SENSORS;

CANTILEVER BEAMS; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; FREQUENCY RESPONSE; NATURAL FREQUENCIES; TRANSDUCERS;

EID: 33845582401     PISSN: 09544062     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544062JMES150     Document Type: Article

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