Detection of 2-mercaptoethanol using gold-coated micromachined cantilevers

Sensors and Actuators, B: Chemical

Volumn 61, Issue 1, 1999, Pages 75-82

  Datskos, Panos G ^a   Sauers, Isidor ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETHANOL; GAS ADSORPTION; GOLD; METALLIC FILMS; MICROMACHINING; SILICON NITRIDE; VAPORS;

MERCAPTOETHANOL; MICROCANTILEVERS; MOLECULAR ADSORPTION;

GAS DETECTORS;

EID: 0033554758     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00251-8     Document Type: Article

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28. Note: If the deformation of the AFM cantilever tip/substrate junction is small compared to the deflection of the substrate, then a linear deflection is obtained for the contact region of the microcantilever deflection as a function of distance trace. This linear response was observed for all calibration data used in our experiments.