Laminated, sacrificial-poly MEMS technology in standard CMOS

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 346-355

  Guillou, D F ^a   Santhanam, S ^a   Carley, L R ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DIELECTRIC MATERIALS; DRY ETCHING; FABRICATION; MICROACTUATORS; MICROMACHINING; MICROSENSORS; POLYSILANES; SIGNAL PROCESSING; STABILITY;

ELECTRICAL/MECHANICAL INTEGRATION; INTEGRATED MICRO-SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034250942     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00374-5     Document Type: Article

References (24)

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