Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 480-486

  Villanueva, G ^a   Montserrat, J ^a   Perez Murano F ^a   Rius, G ^a   Bausells, J ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Cantilever; Force sensor; Piezoresistive cantilever; Polysilicon

Indexed keywords

ANTIGEN-ANTIBODY REACTIONS; ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; IMMUNOLOGY; POLYSILICON; PROTEINS; RESISTORS; SENSORS;

CANTILEVERS; FORCE SENSORS; PIEZORESISTIVE CANTILEVERS;

MICROELECTRONICS;

EID: 2542433506     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00197-2     Document Type: Conference Paper

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