Iridium metal thin films and patterned IrO2 nanowires deposited using iridium(I) carbonyl precursors

Chemical Vapor Deposition

Volumn 12, Issue 7, 2006, Pages 442-447

  Chen, Yao Lun ^a   Hsu, Chiao Chun ^a   Song, Yi Hwa ^a   Chi, Yun ^a   Carty, Arthur J ^b   Peng, Shie Ming ^c   Lee, Gene Hsiang ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Aminoalkoxide; Carbonyl; Iridium dioxide; Nanowires; Thin films

Indexed keywords

CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; COMPLEXATION; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS;

AMINOALKOXIDE; CARBONYL; IRIDIUM DIOXIDE; NANOWIRES;

IRIDIUM COMPOUNDS;

EID: 33845562731     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200606491     Document Type: Article

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