New Precursors for Chemical Vapor Deposition of Iridium

Chemistry of Materials

Volumn 10, Issue 9, 1998, Pages 2329-2331

  Xu, Chongying ^a   Baum, Thomas H ^a   Rheingold, Arnold L ^b  

^a Adv Delivery Chem Systems Ltd   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001597819     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm980346x     Document Type: Article

References (16)

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