Iridium coatings grown by metal-organic chemical vapor deposition hot-wall CVD reactor

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 208-213

  Maury, F ^a   Senocq, F ^a  

^a CNRS   (France)

Author keywords

Chemical vapor deposition; Iridium coatings; Kinetic model

Indexed keywords

CHEMICAL REACTORS; IRIDIUM; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; OXIDATION; PYROLYSIS;

COLD-WALL CHEMICAL VAPOR DEPOSITION (CVD) REACTORS;

PROTECTIVE COATINGS;

CHEMICAL VAPOR DEPOSITION; INORGANIC COATING; IRIDIUM; KINETICS;

EID: 0037472732     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00485-1     Document Type: Article

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