Modeling of chemical vapor deposition of large-area silicon carbide thin film

Crystal Growth and Design

Volumn 6, Issue 11, 2006, Pages 2592-2597

  Wang, Rong ^a   Ma, Ronghui ^a   Zupan, Marc ^a  

^a Baltimore County   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33751270931     PISSN: 15287483     EISSN: None     Source Type: Journal    
DOI: 10.1021/cg060401b     Document Type: Article

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