Characterization of ultrathin gate dielectrics by grazing X-ray reflectance and VUV spectroscopic ellipsometry on the same instrument

Journal of Non-Crystalline Solids

Volumn 303, Issue 1, 2002, Pages 167-174

  Boher, Pierre ^a   Evrard, Patrick ^a   Piel, Jean Philippe ^a   Stehle, Jean Louis ^a  

^a SOPRA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIELECTRIC MATERIALS; INTERFACES (MATERIALS); MATHEMATICAL MODELS; ULTRAVIOLET SPECTROSCOPY; X RAY ANALYSIS;

ULTRATHIN GATE DIELECTRICS;

GATES (TRANSISTOR);

EID: 0036567768     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(02)00980-8     Document Type: Article

References (12)