Oxidation of hydrogen-passivated silicon surfaces by scanning near-field optical lithography using uncoated and aluminum-coated fiber probes

Journal of Applied Physics

Volumn 82, Issue 1, 1997, Pages 49-53

  Madsen, S ^a,b   Bozhevolnyi, S I ^c   Birkelund, K ^b   Mullenborn M ^b   Hvam, J M ^b   Grey, F ^b  

^a DME Danish Micro Engineering A/S   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c AALBORG UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003953221     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365847     Document Type: Article

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