Surface-forces-driven instability of comb-drive microcantilevers in MEMS

Journal of Adhesion Science and Technology

Volumn 20, Issue 10, 2006, Pages 1125-1146

  Zhu, J ^a   Ru, C Q ^a   Mioduchowski, A ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

MEMS; Microcantilevers; Surface forces

Indexed keywords

ARRAYS; BENDING (DEFORMATION); CANTILEVER BEAMS; ITERATIVE METHODS; NUMERICAL METHODS; SURFACE PHENOMENA; MEMS; STABILITY;

COMB-DRIVE STRUCTURES; MICROCANTILEVERS; SURFACE FORCES; SURFACE-FORCES;

MICROELECTROMECHANICAL DEVICES; COMPOSITE MICROMECHANICS;

BEAM-BEAM INTERACTION; BENDING STIFFNESS; COMBDRIVE; CRITICAL VALUE; END EFFECTS; INTERACTION COEFFICIENT; MICRO-CANTILEVERS; OVERLAP LENGTH; RELATIVE ERRORS; SIMPLE METHOD; SPRING MODEL; SPRING SYSTEM; SURFACE FORCES;

EID: 33748683441     PISSN: 01694243     EISSN: None     Source Type: Journal    
DOI: 10.1163/156856106777890635     Document Type: Article

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