Electrically tunable collective response in a coupled micromechanical array

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 802-807

  Buks, Eyal ^a   Roukes, Michael L ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Grating; MEMS; Nonlinear; Parametric resonance

Indexed keywords

DIFFRACTION GRATINGS; ELECTROSTATICS; GOLD; REAL TIME SYSTEMS; WAVEFORM ANALYSIS;

PARAMETRIC RESONANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036904826     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805056     Document Type: Article

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