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Volumn 396, Issue 1-2, 2001, Pages 9-15

Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition

(10) Barranco, A a Yubero, F a Cotrino, J b Espinos J P a Benitez J a Rojas, T C a Allain, J c Girardeau, T c Riviere J P c Gonzalez Elipe A R a

a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA (Spain)

b UNIVERSITY OF SEVILLE (Spain)

c UNIVERSITÉ DE POITIERS (France)

Author keywords

Chemical vapor deposition; Ion bombardment; Plasma processing and deposition; Silicon oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

NUCLEAR REACTION ANALYSIS (NRA);

THIN FILMS;

EID: 0035928994 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01261-5 Document Type: Article

Times cited : (46)

References (34)

1
- 0029359901
- (1995) Adv. Mater. , vol.7 , pp. 703
- Balk, P.¹

2
- 84975945780
- Jun-Aug.
- (1987) MRS Bull. , pp. 20
- Griscom, D.L.¹

3
- 0017535897
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 1082
- Kern, W.¹ Rosler, R.S.²

4
- 33645374893
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 681
- Lucovsky, G.¹ Richard, P.D.² Tsu, D.V.³ Lin, S.Y.⁴ Markunas, R.J.⁵

5
- 0022561337
- (1986) J. Vac. Sci. Technol. B , vol.4 , pp. 295
- Roppel, T.¹ Reinhard, D.K.² Asmussen, J.³

6
- 0024704024
- (1989) Thin Solid Films , vol.174 , pp. 159
- Lange, P.¹ Windbracke, W.²

7
- 0001437798
- (1990) J. Appl. Phys. , vol.68 , pp. 3532
- Lange, P.¹ Schnakenberg, U.² Ullerich, S.³ Schliwinski, H.-J.⁴

8
- 0032483892
- (1998) Thin Solids Films , vol.334 , pp. 92
- Song, Y.¹ Sakurai, T.² Kishimoto, K.³ Maruta, K.⁴ Matsumoto, Sh.⁵ Kikuchi, K.⁶

9
- 0031482158
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1951
- Nakashima, N.¹ Furukawa, K.² Lin, Y.C.³ Gao, D.W.⁴ Kashiwazaki, Y.⁵ Muraoka, K.⁶ Shibata, K.⁷ Tsurushima, T.⁸

10
- 36549098945
- (1989) J. Appl. Phys. , vol.66 , pp. 201
- Lange, P.¹

11
- 0004043422
- Dec.
- (1968) RCA Rev. , pp. 618
- Strater, K.¹

12
- 0001689833
- (1994) Phys. Rev. B , vol.50 , pp. 4881
- Montero, I.¹ Galán, L.² Najmi, O.³ Albella, J.M.⁴

13
- 0032715345
- (1999) Thin Solid Films , vol.338 , pp. 269
- Alvisi, M.¹ De Nuncio, G.² Perrone, M.R.³ Rizzo, A.⁴ Scaglione, S.⁵ Vasanelli, L.⁶

14
- 0342726144
- (1997) Avd. Mater. CVD , vol.3 , pp. 219
- Espinós, J.P.¹ Fernández, A.² Jiménez, V.M.³ Sánchez-López, J.C.⁴ Contreras, L.⁵ Leinen, D.⁶ González-Elipe, A.R.⁷

15
- 84957349911
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 2728
- Leinen, D.¹ Espinós, J.P.² Fernández, A.³ González-Elipe, A.R.⁴

16
- 0343913109
- (1994) Plasma Sources Sci. Technol. , vol.3 , pp. 473
- Werner, F.¹ Korzec, D.² Engemann, J.³

17
- 0001300002
- (1992) Appl. Phys. Lett. , vol.60 , pp. 198
- Liehr, M.¹ Cohen, S.A.²

18
- 0002797460
- Ph. D. Thesis, Universidad Autónoma de Madrid, Spain
- (1999)
- Ojeda, F.¹

19
- 0030107686
- (1996) Surf. Coat. Technol. , vol.80 , pp. 8
- Etemadi, R.¹ Godet, C.² Perrin, C.³ Bouree, J.⁴ Drevillon, B.⁵ Clerc, C.⁶

20
- 84964768377
- (1995) J. Non-Cryst. Solids , vol.187 , pp. 75
- Parada, E.G.¹ Gonzalez, P.² Serra, P.³ Leon, J.⁴ Perezamor, M.⁵ Dasilva, M.F.⁶ Wolters, H.⁷ Soares, J.C.⁸

21
- 0025434549
- (1990) J. Non-Crystalline Solids , vol.121 , pp. 193
- Almeida, R.M.¹ Guiton, T.A.² Pantano, C.G.³

22
- 0031248024
- (1997) Thin Solid Films , vol.308 , pp. 68
- Haque, M.S.¹ Naseem, H.A.² Brown, W.D.³

23
- 0001306678
- (1985) J. Non-Cryst. Solids , vol.75 , pp. 429
- Lucovsky, G.¹ Yang, J.² Caho, S.S.³ Takagi, Y.⁴ Pal, P.⁵ Keem, J.E.⁶ Tyler, J.E.⁷

24
- 36549090717
- (1990) J. Appl. Phys. , vol.68 , pp. 4225
- Almeida, R.M.¹ Pantano, C.G.²

25
- 26744445785
- (1963) Phys. Rev. , vol.130 , pp. 2193
- Berreman, D.W.¹

26
- 0000871931
- (1989) J. Appl. Cryst. , vol.22 , pp. 460
- Naudon, A.¹ Chihab, J.² Goudeau, P.³ Mimault, J.⁴

27
- 0004232975
- Wiley-Interscience, New York
- (1964) The Constitution of Glasses
- Weyl, W.A.¹ Marbone, E.C.²

28
- 0003412161
- Pergamon, New York
- (1986) The Stopping and Range of Ions in Solids , vol.1-2
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

29
- 0032757504
- (1999) Thin Solids Films , vol.338 , pp. 49
- Zajícková, L.¹ Janca, J.² Perina, V.³

30
- 0000600226
- (1992) Trans. Mater. Rec. Soc. Jpn. , vol.8 , pp. 165
- Devine, R.A.B.¹

31
- 0034273848
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2452
- Goullet, A.¹ Vallée, C.² Granier, A.³ Turban, G.⁴

32
- 0003448622
- Elsevier Science Publishers B.V.
- (1986) Ion Bombardment Modification of Surfaces
- Auciello, O.¹ Kelly, R.²

33
- 37049074599
- (1995) J. Chem. Soc. Dalton Trans. , pp. 1529
- Belderrain, T.R.¹ Espinós, J.P.² Fernández, A.³ González-Elipe, A.R.⁴ Leinen, D.⁵ Monge, A.⁶ Paneque, M.⁷ Ruiz, C.⁸ Carmona, E.⁹

34
- 0032398538
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 544
- Meeks, E.¹ Larson, R.S.² Ho, P.³ Apblett, C.⁴ Han, S.M.⁵ Edelberg, E.⁶ Aydil, E.S.⁷

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