SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 183-187

Chemical structure of silicon-, oxygen- and nitrogen-containing a-C:H films prepared by RF plasma beam CVD

(4) Toth A a Mohai, M a Ujvari T a Bertoti I a

a CHEMICAL RESEARCH CENTER (Hungary)

Author keywords

Auger parameter; Diamond like carbon; Silicon; XPS

Indexed keywords

ALUMINUM; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CROSSLINKING; ELECTRON CYCLOTRON RESONANCE; NITROGEN; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER PARAMETERS; CHEMICAL STRUCTURES; DIAMOND-LIKE CARBON; VALENCE BAND ANALYSIS;

DIAMOND LIKE CARBON FILMS;

EID: 17744395546 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.11.136 Document Type: Conference Paper

Times cited : (17)

References (20)

1
- 0034310618
- J.C. Damasceno, S.S. Camargo Jr., F.L. Freire Jr., and R. Carius Surf. Coat. Technol. 133-134 2000 247
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 247
- Damasceno, J.C.¹ Camargo Jr., S.S.² Freire Jr., F.L.³ Carius, R.⁴

2
- 0032675783
- W.-J. Wu, and M.-H. Hon Surf. Coat. Technol. 111 1999 134
- (1999) Surf. Coat. Technol. , vol.111 , pp. 134
- Wu, W.-J.¹ Hon, M.-H.²

3
- 0142227086
- T.I.T. Okpalugo, A.A. Ogwu, P.D. Maguire, and J.A.D. McLaughlin Biomaterials 25 2004 239
- (2004) Biomaterials , vol.25 , pp. 239
- Okpalugo, T.I.T.¹ Ogwu, A.A.² Maguire, P.D.³ McLaughlin, J.A.D.⁴

4
- 0037508693
- L.-Y. Chen, and F.C.-N. Hong Diamond Relat. Mater. 12 2003 968
- (2003) Diamond Relat. Mater. , vol.12 , pp. 968
- Chen, L.-Y.¹ Hong, F.C.-N.²

5
- 3042792082
- L. Zajicková, V. Bursiková, V. Perina, A. Macková, and J. Janca Surf. Coat. Technol. 174-175 2003 281
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 281
- Zajicková, L.¹ Bursiková, V.² Perina, V.³ MacKová, A.⁴ Janca, J.⁵

6
- 0032026026
- C. Donnet Surf. Coat. Technol. 100-101 1998 180
- (1998) Surf. Coat. Technol. , vol.100-101 , pp. 180
- Donnet, C.¹

7
- 0032007250
- D. Neerinck, P. Persoone, M. Sercu, A. Goel, D. Kester, and D. Bary Diamond Relat. Mater. 7 1998 468
- (1998) Diamond Relat. Mater. , vol.7 , pp. 468
- Neerinck, D.¹ Persoone, P.² Sercu, M.³ Goel, A.⁴ Kester, D.⁵ Bary, D.⁶

8
- 0035386690
- E. Dekempeneer, K. Van Acker, K. Vercammen, J. Meneve, D. Neerinck, S. Eufinger, W. Pappaert, M. Sercu, and J. Smeets Surf. Coat. Technol. 142-144 2001 669
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 669
- Dekempeneer, E.¹ Van Acker, K.² Vercammen, K.³ Meneve, J.⁴ Neerinck, D.⁵ Eufinger, S.⁶ Pappaert, W.⁷ Sercu, M.⁸ Smeets, J.⁹

9
- 0037454538
- W.J. Yang, Y.-H. Choa, T. Sekino, K.B. Shim, K. Niihara, and K.H. Auh Surf. Coat. Technol. 162 2003 183
- (2003) Surf. Coat. Technol. , vol.162 , pp. 183
- Yang, W.J.¹ Choa, Y.-H.² Sekino, T.³ Shim, K.B.⁴ Niihara, K.⁵ Auh, K.H.⁶

10
- 17644425386
- in press
- A. Tóth, M. Mohai, T. Ujvári, I. Bertóti, Thin Solid Films (in press).
- Thin Solid Films
- Tóth, A.¹ Mohai, M.² Ujvári, T.³ Bertóti, I.⁴

11
- 0003685412
- Wiley Chichester
- G. Beamson, and D. Briggs High Resolution XPS of Organic Polymers. The Scienta ESCA300 Database 1992 Wiley Chichester 268
- (1992) High Resolution XPS of Organic Polymers. the Scienta ESCA300 Database , pp. 268
- Beamson, G.¹ Briggs, D.²

12
- 0030219141
- A. Tóth, I. Bertóti, G. Marletta, G.G. Ferenczy, and M. Mohai Nucl. Instrum. Methods B116 1996 299
- (1996) Nucl. Instrum. Methods , vol.116 , pp. 299
- Tóth, A.¹ Bertóti, I.² Marletta, G.³ Ferenczy, G.G.⁴ Mohai, M.⁵

13
- 4444223813
- M. Mohai Surf. Interface Anal. 36 2004 828
- (2004) Surf. Interface Anal. , vol.36 , pp. 828
- Mohai, M.¹

14
- 0020208495
- C.D. Wagner, D.E. Passoja, H.F. Hillery, T.G. Kinisky, H.A. Six, W.T. Jansen, and J.A. Taylor J. Vac. Sci. Technol. 21 1982 933
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 933
- Wagner, C.D.¹ Passoja, D.E.² Hillery, H.F.³ Kinisky, T.G.⁴ Six, H.A.⁵ Jansen, W.T.⁶ Taylor, J.A.⁷

15
- 38549109871
- K.L. Smith, and K.M. Black J. Vac. Sci. Technol., A 2 1984 744
- (1984) J. Vac. Sci. Technol., A , vol.2 , pp. 744
- Smith, K.L.¹ Black, K.M.²

16
- 5844227058
- I. Bertóti, A. Tóth, M. Mohai, and M. Révész Acta Chim. Hungarica-Models Chem. 130 1993 837
- (1993) Acta Chim. Hungarica-Models Chem. , vol.130 , pp. 837
- Bertóti, I.¹ Tóth, A.² Mohai, M.³ Révész, M.⁴

17
- 0036494861
- I. Bertóti Surf. Coat. Technol. 151-152 2002 194
- (2002) Surf. Coat. Technol. , vol.151-152 , pp. 194
- Bertóti, I.¹

18
- 0029276540
- L. Lozzi, M. Passacantando, P. Picozzi, and S. Santucci J. Electron Spectrosc. Relat. Phenom. 72 1995 97
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.72 , pp. 97
- Lozzi, L.¹ Passacantando, M.² Picozzi, P.³ Santucci, S.⁴

19
- 0000567232
- G.G. Ferenczy, A. Tóth, I. Bertóti, and S. Suhai J. Phys., Condens. Matter 9 1997 4781
- (1997) J. Phys., Condens. Matter , vol.9 , pp. 4781
- Ferenczy, G.G.¹ Tóth, A.² Bertóti, I.³ Suhai, S.⁴

20
- 0028463534
- A. Tóth, I. Bertóti, and V.S. Khotimsky Surf. Interface Anal. 22 1994 551
- (1994) Surf. Interface Anal. , vol.22 , pp. 551
- Tóth, A.¹ Bertóti, I.² Khotimsky, V.S.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.