Ion beam synthesis of α-CNx:H films

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 180-183

  Kopustinskas, V ^a   Meskinis S ^a   Grigaliunas, V ^a   Tamulevicius S ^a   Puceta, M ^a   Niaura, G ^b   Tomasiunas R ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

^c VILNIUS UNIVERSITY   (Lithuania)

Author keywords

Hydrogenated amorphous carbon nitride films; Ion beam deposition; Raman spectra; Refractive index; Wear resistance

Indexed keywords

CARBON NITRIDE; DEPOSITION; ELECTROSTATICS; HYDROGEN; HYDROGENATION; ION BEAMS; REFRACTIVE INDEX; WEAR RESISTANCE;

GAS MIXTURE;

THIN FILMS;

CARBON NITRIDE; HYDROGENATION; REFRACTIVE INDEX; SYNTHESIS; WEAR RESISTANCE;

EID: 0036495622     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01573-0     Document Type: Article

References (19)